Monash University

Embargoed and Restricted Access

Reason: Under embargo until 4 October 2024. After this date a copy can be supplied under Section 51(2) of the Australian Copyright Act 1968 by submitting a document delivery request through your library

Zinc Oxide/SU-8/ultra-thin silicon/SU-8: A new multi-layered substrate to facilitate facile microfabrication of flexible one-port Lamb wave resonator sensors

posted on 2023-10-03, 21:27 authored by AMARDEEP SINGH DHILLON A/L GURDIR SINGH
Although flexible Lamb wave sensors have been extensively researched in the past decade towards wearable sensing applications, the excessive damping of acoustic waves caused by the polymer thick film used as substrate for these devices demands their expensive microfabrication for operation at extremely low device wavelengths. In this work, a novel multilayered flexible substrate utilizing polymer-encapsulated ultra-thin silicon with minimal damping is designed, fabricated, and tested for flexible Lamb wave humidity sensing applications. The resultant devices show a higher performance as compared to previous reports and the ability to operate at much higher device wavelengths, thereby facilitating their low-cost fabrication.


Campus location


Principal supervisor

Ajay Achath

Additional supervisor 1

Narayanan Ramakrishnan

Year of Award


Department, School or Centre

School of Engineering (Monash University Malaysia)


Doctor of Philosophy

Degree Type



Faculty of Engineering