This thesis explores the application of thin metal oxide films grown through atomic layer deposition (ALD) for use in perovskite solar cells. It investigates how the ALD deposition conditions of the metal oxide thin film influence the performance of the perovskite solar cell when these ALD-grown thin-films are adopted in the architecture of the perovskite solar cells. The thesis also introduces two modification strategies, surface passivation and metallic doping, for the ALD-grown metal oxide thin film aimed at enhancing the overall performance of the perovskite solar cells. This research provides a deeper understanding of the use of ALD-grown metal oxide films in perovskite solar cells, along with the potential for further advancements in the field.