Thesis_FinalSubmission_MonashPortal_072021.pdf (9.57 MB)
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Study of Ion Beam Interaction with Materials and Nanostructure Fabrication

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posted on 05.07.2021, 00:51 by Bhaveshkumar Kamaliya
This work aims at achieving novel fabrication strategies using ion beam-induced self-organization toward hierarchical and 3D nanostructures. With the focused ion beam (FIB) induced nanoscale control on the Ge surface, orientation controlled quasi-periodic nanoripples are consummated with antireflection properties. Further, an easy and single-step method to manipulate the morphology of circular nanoholes via FIB irradiation is demonstrated with theoretical insights supported by molecular dynamics simulations. Through nanoscale control over self-organization process dynamics on the surface of germanium, periodic and protruding (3D) nanoscale-polygons are realized. The demonstrated morphology manipulation promises to surmount the roadblocks toward miniaturization in the field of nanofabrication.


Campus location


Principal supervisor

Jing Fu

Additional supervisor 1

Rakesh G. Mote

Additional supervisor 2

Mohammed Aslam

Year of Award


Department, School or Centre

Mechanical & Aerospace Engineering

Additional Institution or Organisation



Doctor of Philosophy

Degree Type



Faculty of Engineering