Monash University
Thesis_CCLOO_finalized_v2.pdf (55.64 MB)

Nanoscale Electrical, Mechanical, and Optoelectronic Properties of III-nitrides via Advanced Atomic Force Microscopy

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posted on 2023-09-14, 07:24 authored by CHIN CHYI LOO
Motivated by the trend of miniaturization of III-nitrides technology and the rising demand for multifunctional devices, this thesis investigates the nanoscale functional properties of III-nitrides at the nanoscale. It reveals the light-induced strain effect for the first time in III-nitrides, extending the applications of III-nitrides to the optomechanical domain. Besides, it investigates the defects in a relatively new III-nitride, the indium nitride. This insight is essential to producing high-quality indium nitride, crucial for realizing the next-generation terahertz applications. Lastly, this thesis showcases the use of various atomic force microscopy techniques for drawing valuable insight into semiconductors’ nanoscale material properties.


Campus location


Principal supervisor

Chang Wei Sea

Additional supervisor 1

Ng Sha Shiong

Year of Award


Department, School or Centre

School of Engineering (Monash University Malaysia)


Doctor of Philosophy

Degree Type



Faculty of Engineering