Investigations into One Port SAW Resonator Sensors: Design, Analysis, and Fabrication

There is increase in demand for miniaturized sensors to meet the need of wearable and Internet of things market. Surface acoustic wave sensors are class of micro sensors well known to detect gases and environmental conditions. However, the sensing medium and transducer circuitry of these types of sensors are relatively larger for packing. Accordingly, this thesis propose design and methods to fabricate surface acoustic wave sensors that are small in size and possess high stability, and sensitivity characteristics.