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Focused Ion Beam (FIB) Fabrication of Novel 2D/3D Nanoscale Structures: Process Modeling and Applications

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thesis
posted on 04.05.2020, 04:53 authored by VIVEK GARG
3D micro-nanostructures find multidisciplinary applications such as optics, photovoltaics, medical devices. This work aims at the fabrication of nanostructures for diverse applications like anti-reflection, color filters, controlled manipulation with a focused ion beam (FIB). Pillar shaped silicon (Si) nanostructures are developed, enabling broadband light tapping, antireflection properties. The fabricated Si nanoholes offer color filtering facilitating multicolor generation and high-resolution color printing applications. Freestanding 3D Si nanostructures and their controlled manipulation are developed, including a multiscale model elucidating the bending mechanism. The direct fabrication and strain-engineering pave the way towards a versatile platform for 3D nanostructures with anticipated functionalities and applications.s

History

Campus location

Australia

Principal supervisor

Jing Fu

Additional supervisor 1

Rakesh G. Mote

Year of Award

2020

Department, School or Centre

Mechanical and Aerospace Engineering

Additional Institution or Organisation

Indian Institute of Technology Bombay, Mumbai, India

Course

Doctor of Philosophy (IITB-Monash)

Degree Type

DOCTORATE