Monash University
Thesis Vivek_Monash Portal.pdf (9.88 MB)

Focused Ion Beam (FIB) Fabrication of Novel 2D/3D Nanoscale Structures: Process Modeling and Applications

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posted on 2020-05-04, 04:53 authored by VIVEK GARG
3D micro-nanostructures find multidisciplinary applications such as optics, photovoltaics, medical devices. This work aims at the fabrication of nanostructures for diverse applications like anti-reflection, color filters, controlled manipulation with a focused ion beam (FIB). Pillar shaped silicon (Si) nanostructures are developed, enabling broadband light tapping, antireflection properties. The fabricated Si nanoholes offer color filtering facilitating multicolor generation and high-resolution color printing applications. Freestanding 3D Si nanostructures and their controlled manipulation are developed, including a multiscale model elucidating the bending mechanism. The direct fabrication and strain-engineering pave the way towards a versatile platform for 3D nanostructures with anticipated functionalities and applications.s


Campus location


Principal supervisor

Jing Fu

Additional supervisor 1

Rakesh G. Mote

Year of Award


Department, School or Centre

Mechanical and Aerospace Engineering

Additional Institution or Organisation

Indian Institute of Technology Bombay, Mumbai, India


Doctor of Philosophy (IITB-Monash)

Degree Type



Faculty of Engineering