Focused Ion Beam (FIB) Fabrication of Novel 2D/3D Nanoscale Structures: Process Modeling and Applications

3D micro-nanostructures find multidisciplinary applications such as optics, photovoltaics, medical devices. This work aims at the fabrication of nanostructures for diverse applications like anti-reflection, color filters, controlled manipulation with a focused ion beam (FIB). Pillar shaped silicon (Si) nanostructures are developed, enabling broadband light tapping, antireflection properties. The fabricated Si nanoholes offer color filtering facilitating multicolor generation and high-resolution color printing applications. Freestanding 3D Si nanostructures and their controlled manipulation are developed, including a multiscale model elucidating the bending mechanism. The direct fabrication and strain-engineering pave the way towards a versatile platform for 3D nanostructures with anticipated functionalities and applications.s