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Reason: Under embargo until December 2021. After this date a copy can be supplied under Section 51(2) of the Australian Copyright Act 1968 by submitting a document delivery request through your library
Development of Solid State Lighting Based Microfabrication Systems for Semiconductor and MEMS Device Fabrication
thesis
posted on 2018-12-04, 05:28 authored by NEAM HENG LEEMicroelectronic devices like integrated circuits (IC) chips are key components in modern day electronic products ranging from smartphones to industrial automation systems. In general, these tiny devices are manufactured through extensive processes like photolithography using microfabrication equipments such as mask aligner system. The thesis research focused on translating fundamental optical properties of solid state lighting devices such as ultraviolet LEDs and organic LEDs to prototype first lens less mask aligner system for photolithography process . The research work aided towards development of inventive microfabrication fabrication equipments that has potential to fabricate micrometer sized functional devices .