Integrated of microfluidic reactor processes has inherent advantages when processing small samples. This technology holds promise in addressing issues arising from sample loss, especially during mass spectrometry (MS) based proteome analysis. In this thesis, the exploration of novel fluid handling methods via the integration of microvalves and capacitive sensors, along with added capabilities offered by surface acoustic waves based actuation and a microfluidic reactor, was developed for effective MS sample preparation. The developed technology lays the ground work for further improvements in single cell analysis techniques, enabling a better understanding of cellular proteins.