Design, Optimisation, and Control of Multi Degrees of Freedom Monolithic Micro/Nano Manipulators

Three new monolithic compliant parallel micro/nano manipulators with different capabilities are introduced and the analytical modelling and computational analyses are presented. A novel optimisation approach is introduced utilising FEA for the structural optimisation of an entire 3D spatial micro/nano manipulator. Adaptive control methodologies are developed for high resolution and precise reference tracking of compliant manipulation systems. The experimental validation of the developed manipulation systems and control methodologies are conducted to present their behaviours including the in-depth dynamic and motion tracking performances, and hysteresis reduction. Comparative analyses are established to validate the obtained results from the experimentation and simulation.