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Design, Fabrication and Characterization of QCM-Micropillar Coupled- Resonating Sensors
thesisposted on 13.03.2018, 00:25 by MOHAMMAD ALI MOHAMMADZADEH KASHAN
Sensors are important components in modern day electronic systems. This thesis presents novel design and fabrication methods to devise highly sensitive microsensors to detect physical quantities such as pressure change and humidity.