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Reason: Under embargo until March 2021. After this date a copy can be supplied under Section 51 (2) of the Australian Copyright Act 1968 by submitting a document delivery request through your library
Design, Fabrication and Characterization of QCM-Micropillar Coupled- Resonating Sensors
thesisposted on 2018-03-13, 00:25 authored by MOHAMMAD ALI MOHAMMADZADEH KASHAN
Sensors are important components in modern day electronic systems. This thesis presents novel design and fabrication methods to devise highly sensitive microsensors to detect physical quantities such as pressure change and humidity.