Design, Fabrication and Characterization of QCM-Micropillar Coupled- Resonating Sensors

KASHAN, MOHAMMAD ALI MOHAMMADZADEH

doi:10.4225/03/5aa7347f6ec67

Design, Fabrication and Characterization of QCM-Micropillar Coupled- Resonating Sensors

thesis

posted on 2018-03-13, 00:25 authored by MOHAMMAD ALI MOHAMMADZADEH KASHAN

Sensors are important components in modern day electronic systems. This thesis presents novel design and fabrication methods to devise highly sensitive microsensors to detect physical quantities such as pressure change and humidity.

History

Campus location

Malaysia

Principal supervisor

Vineetha Kalavally

Additional supervisor 1

Narayanan Ramakrishnan

Year of Award

2018

Department, School or Centre

School of Engineering (Monash University Malaysia)

Course

Doctor of Philosophy

Degree Type

DOCTORATE

Faculty

Faculty of Engineering

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Keywords

quartz crystal microbalance system of coupled resonator high aspect ratio micropillars acoustic sensor Nanoelectromechanical Systems Nanoelectronics Nanomanufacturing Microelectromechanical Systems (MEMS)Microelectronics and Integrated Circuits Microtechnology

Licence

In Copyright

Design, Fabrication and Characterization of QCM-Micropillar Coupled- Resonating Sensors

History

Campus location

Principal supervisor

Additional supervisor 1

Year of Award

Department, School or Centre

Course

Degree Type

Faculty

Usage metrics

Categories

Keywords

Licence

Exports